Authors:
ENISHERLOVA KL
RUSAK TF
CHERVYAKOVA EN
VINOGRADOV RN
Citation: Kl. Enisherlova et al., SOI-STRUCTURES PRODUCED BY THE SILICON DIRECT BONDING METHOD, Materials science & engineering. B, Solid-state materials for advanced technology, 46(1-3), 1997, pp. 33-37
Citation: Kl. Enisherlova et al., EFFECT OF NATIVE POINT-DEFECTS ON MORPHOLOGY OF GETTERING CENTERS IN CZ-SILICON WAFERS, Materials science & engineering. B, Solid-state materials for advanced technology, 36(1-3), 1996, pp. 120-124