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Tripathy, S
Ramam, A
Chua, SJ
Pan, JS
Huan, A
Citation: S. Tripathy et al., Characterization of inductively coupled plasma etched surface of GaN usingCl-2/BCl3 chemistry, J VAC SCI A, 19(5), 2001, pp. 2522-2532
Authors:
Tan, LS
Prakash, S
Ng, KM
Ramam, A
Chua, SJ
Wee, ATS
Lim, SL
Citation: Ls. Tan et al., Formation of Ti/Al ohmic contacts on Si-doped GaN epilayers by low temperature annealing, SEMIC SCI T, 15(6), 2000, pp. 585-588
Authors:
Remashan, K
Chua, SJ
Ramam, A
Prakash, S
Liu, W
Citation: K. Remashan et al., Inductively coupled plasma etching of GaN using BCl3/Cl-2 chemistry and photoluminescence studies of the etched samples, SEMIC SCI T, 15(4), 2000, pp. 386-389
Authors:
Choi, WK
Chen, JH
Bera, LK
Feng, W
Pey, KL
Mi, J
Yang, CY
Ramam, A
Chua, SJ
Pan, JS
Wee, ATS
Liu, R
Citation: Wk. Choi et al., Structural characterization of rapid thermal oxidized Si1-x-yGexCy alloy films grown by rapid thermal chemical vapor deposition, J APPL PHYS, 87(1), 2000, pp. 192-197