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Results: 4
Boron gettering on cavities induced by helium implantation in Si
Authors:
Roqueta, F Alquier, D Ventura, L Dubois, C Jerisian, R
Citation:
F. Roqueta et al., Boron gettering on cavities induced by helium implantation in Si, NUCL INST B, 183(3-4), 2001, pp. 318-322
Lateral gettering of iron and platinum by cavities induced by helium implantation in silicon
Authors:
Roqueta, F Ventura, L Grob, JJ Jerisian, R
Citation:
F. Roqueta et al., Lateral gettering of iron and platinum by cavities induced by helium implantation in silicon, NUCL INST B, 178, 2001, pp. 184-187
Lateral gettering of iron by cavities induced by helium implantation in silicon
Authors:
Roqueta, F Ventura, L Grob, JJ Jerisian, R
Citation:
F. Roqueta et al., Lateral gettering of iron by cavities induced by helium implantation in silicon, J APPL PHYS, 88(9), 2000, pp. 5000-5003
Stability of cavities formed by He+ implantation in silicon
Authors:
Roqueta, F Grob, A Grob, JJ Jerisian, R Stoquert, JP Ventura, L
Citation:
F. Roqueta et al., Stability of cavities formed by He+ implantation in silicon, NUCL INST B, 147(1-4), 1999, pp. 298-303
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