Authors:
Druz, B
Zaritskiy, I
Hoehn, J
Polyakov, VI
Rukovishnikov, AI
Novotny, V
Citation: B. Druz et al., Direct ion beam deposition of hard (> 30 GPa) diamond-like films from RF inductively coupled plasma source, DIAM RELAT, 10(3-7), 2001, pp. 931-936
Authors:
Kovalev, VI
Rukovishnikov, AI
Perov, PI
Rossukanyi, NM
Avdeeva, LA
Citation: Vi. Kovalev et al., Development of optical methods and equipment for controlling the manufacturing and parameters of semiconductor structures of nano- and microelectronics, J COMMUN T, 44(11), 1999, pp. 1296-1300