Authors:
KIKUCHI Y
KIHARA N
SUGIHARA S
SAITOH S
KONDO K
NOMURA H
OZAKI T
Citation: Y. Kikuchi et al., REPLICATION OF NEAR 0.1-MU-M HOLE PATTERNS BY USING X-RAY-LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 4298-4302