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Authors: OKAMOTO Y SAITOU N YODA H SAKITANI Y

Citation: Y. Okamoto et al., HIGH-SPEED ELECTRON-BEAM CELL PROJECTION EXPOSURE SYSTEM, IEICE transactions on electronics, E77C(3), 1994, pp. 445-452

Authors: KAWANO M MIZUNO K YODA H SAKITANI Y

Citation: M. Kawano et al., CONTINUOUS WRITING METHOD FOR HIGH-SPEED ELECTRON-BEAM DIRECT WRITINGSYSTEM HL-800D, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2323-2326