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MESSINA G
PAOLETTI A
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TUCCIARONE A
Citation: G. Messina et al., NUMERICAL APPROXIMATION OF THE PHYSICAL LAWS GOVERNING SCATTERING IN ELECTRON-BEAM LITHOGRAPHY, Nuovo cimento della Societa italiana di fisica. D, Condensed matter,atomic, molecular and chemical physics, biophysics, 20(7-8), 1998, pp. 1201-1208
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MESSINA G
SANTANGELO S
PAOLETTI A
TUCCIARONE A
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MESSINA G
PAOLETTI A
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SANTANGELO S
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PAOLETTI A
SANTANGELO S
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PAOLETTI A
SANTANGELO S
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MESSINA G
PAOLETTI A
SANTANGELO S
TUCCIARONE A
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