Authors: SCHROPFER G DELABACHELERIE M BALLANDRAS S BLIND P

Citation: G. Schropfer et al., COLLECTIVE WET ETCHING OF A 3D MONOLITHIC SILICON SEISMIC MASS SYSTEM, Journal of micromechanics and microengineering, 8(2), 1998, pp. 77-79

Authors: SCHROPFER G ELFLEIN W DELABACHELERIE M PORTE H BALLANDRAS S

Citation: G. Schropfer et al., LATERAL OPTICAL ACCELEROMETER MICROMACHINED IN (100)-SILICON WITH REMOTE READOUT BASED ON COHERENCE MODULATION, Sensors and actuators. A, Physical, 68(1-3), 1998, pp. 344-349

Authors: ANSEL Y ROMANOWICZ B RENAUD P SCHROPFER G

Citation: Y. Ansel et al., GLOBAL-MODEL GENERATION FOR A CAPACITIVE SILICON ACCELEROMETER BY FINITE-ELEMENT ANALYSIS, Sensors and actuators. A, Physical, 67(1-3), 1998, pp. 153-158

Authors: SCHROPFER G BALLANDRAS S DELABACHELERIE M BLIND P ANSEL Y

Citation: G. Schropfer et al., FABRICATION OF A NEW HIGHLY-SYMMETRICAL, INPLANE ACCELEROMETER STRUCTURE BY ANISOTROPIC ETCHING OF (100)SILICON, Journal of micromechanics and microengineering, 7(2), 1997, pp. 71-78

Authors: MCCORD J HUBERT A SCHROPFER G LOREIT U

Citation: J. Mccord et al., DOMAIN OBSERVATION ON MAGNETORESISTIVE SENSOR ELEMENTS, IEEE transactions on magnetics, 32(5), 1996, pp. 4806-4808