Citation: Vn. Shabanov et Dv. Shengurov, INFLUENCE OF A METHANE ATMOSPHERE ON THE TEMPERATURE-DEPENDENCE OF THE CONDUCTIVITY OF POLYCRYSTALLINE SILICON FILMS, Technical physics letters, 24(5), 1998, pp. 377-378
Authors:
SHENGUROV DV
PAVLOV DA
SHABANOV VN
SHENGUROV VG
KHOKHLOV AF
Citation: Dv. Shengurov et al., NONMONOTONIC CHARACTER OF THE GROWTH-TEMPERATURE DEPENDENCE OF THE RESISTANCE OF POLYCRYSTALLINE SILICON FILMS, Semiconductors, 32(5), 1998, pp. 562-564
Citation: Sg. Shengurov et al., GROWTH OF DELTA-DOPED SILICON LAYERS BY MOLECULAR-BEAM EPITAXY WITH SIMULTANEOUS LOW-ENERGY ION-BOMBARDMENT OF THE GROWTH SURFACE, Technical physics letters, 23(4), 1997, pp. 281-283