Authors: SHANG ZK CHEN KQ ZENG XC LI JQ TONG HH WANG HS GENG M XING DZ WANG JQ

Citation: Zk. Shang et al., PLASMA SOURCE ION-IMPLANTATION PROJECT AT SOUTHWESTERN-INSTITUTE-OF-PHYSICS, Surface & coatings technology, 85(1-2), 1996, pp. 105-110

Authors: WANG HS CHENG KQ LI JQ GENG M ZHENG XC XING DZ SHANG ZK

Citation: Hs. Wang et al., INTERACTION BETWEEN THE PLASMA THE THE WORKPIECE SURFACE IN THE PROCESS OF PLASMA SOURCE ION-IMPLANTATION, Surface & coatings technology, 66(1-3), 1994, pp. 525-528