Authors:
LIU J
SON UT
STEPANOVA AN
CHRISTENSEN KN
WOJAK GJ
GIVARGIZOV EI
BACHMANN KJ
HREN JJ
Citation: J. Liu et al., MODIFICATION OF SI FIELD EMITTER SURFACES BY CHEMICAL CONVERSION TO SIC, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(2), 1994, pp. 717-721