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Authors: ZELENIN VV SOLOVEV VG STAROBINETS SM KONNIKOV SG CHELNOKOV VE

Citation: Vv. Zelenin et al., GROWTH OF EPITAXIAL-FILMS OF SIC BY CHEMICAL-VAPOR-DEPOSITION IN THE CH3SICL3-H-2 SYSTEM, Semiconductors, 29(6), 1995, pp. 581-583