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Results: 1-11 |
Results: 11
A NEW SILICON GAS-FLOW SENSOR-BASED ON LIFT FORCE
Authors: SVEDIN N KALVESTEN E STEMME E STEMME G
Citation: N. Svedin et al., A NEW SILICON GAS-FLOW SENSOR-BASED ON LIFT FORCE, Journal of microelectromechanical systems, 7(3), 1998, pp. 303-308
A LIFT-FORCE FLOW SENSOR DESIGNED FOR ACCELERATION INSENSITIVITY
Authors: SVEDIN N KALVESTEN E STEMME E STEMME G
Citation: N. Svedin et al., A LIFT-FORCE FLOW SENSOR DESIGNED FOR ACCELERATION INSENSITIVITY, Sensors and actuators. A, Physical, 68(1-3), 1998, pp. 263-268
A SILICON RESONANT SENSOR STRUCTURE FOR CORIOLIS MASS-FLOW MEASUREMENTS
Authors: ENOKSSON P STEMME G STEMME E
Citation: P. Enoksson et al., A SILICON RESONANT SENSOR STRUCTURE FOR CORIOLIS MASS-FLOW MEASUREMENTS, Journal of microelectromechanical systems, 6(2), 1997, pp. 119-125
MICROMACHINED FLAT-WALLED VALVELESS DIFFUSER PUMPS
Authors: OLSSON A ENOKSSON P STEMME G STEMME E
Citation: A. Olsson et al., MICROMACHINED FLAT-WALLED VALVELESS DIFFUSER PUMPS, Journal of microelectromechanical systems, 6(2), 1997, pp. 161-166
VIBRATION MODES OF A RESONANT SILICON TUBE DENSITY SENSOR
Authors: ENOKSSON P STEMME G STEMME E
Citation: P. Enoksson et al., VIBRATION MODES OF A RESONANT SILICON TUBE DENSITY SENSOR, Journal of microelectromechanical systems, 5(1), 1996, pp. 39-44
A VALVE-LESS PLANAR PUMP ISOTROPICALLY ETCHED IN SILICON
Authors: OLSSON A ENOKSSON P STEMME G STEMME E
Citation: A. Olsson et al., A VALVE-LESS PLANAR PUMP ISOTROPICALLY ETCHED IN SILICON, Journal of micromechanics and microengineering, 6(1), 1996, pp. 87-91
DIFFUSER-ELEMENT DESIGN INVESTIGATION FOR VALVE-LESS PUMPS
Authors: OLSSON A STEMME G STEMME E
Citation: A. Olsson et al., DIFFUSER-ELEMENT DESIGN INVESTIGATION FOR VALVE-LESS PUMPS, Sensors and actuators. A, Physical, 57(2), 1996, pp. 137-143
SILICON TUBE STRUCTURES FOR A FLUID-DENSITY SENSOR
Authors: ENOKSSON P STEMME G STEMME E
Citation: P. Enoksson et al., SILICON TUBE STRUCTURES FOR A FLUID-DENSITY SENSOR, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 558-562
FLUID DENSITY SENSOR-BASED ON RESONANCE VIBRATION
Authors: ENOKSSON P STEMME G STEMME E
Citation: P. Enoksson et al., FLUID DENSITY SENSOR-BASED ON RESONANCE VIBRATION, Sensors and actuators. A, Physical, 47(1-3), 1995, pp. 327-331
A VALVE-LESS PLANAR FLUID PUMP WITH 2 PUMP CHAMBERS
Authors: OLSSON A STEMME G STEMME E
Citation: A. Olsson et al., A VALVE-LESS PLANAR FLUID PUMP WITH 2 PUMP CHAMBERS, Sensors and actuators. A, Physical, 47(1-3), 1995, pp. 549-556
A VALVELESS DIFFUSER NOZZLE-BASED FLUID PUMP
Authors: STEMME E STEMME G
Citation: E. Stemme et G. Stemme, A VALVELESS DIFFUSER NOZZLE-BASED FLUID PUMP, Sensors and actuators. A, Physical, 39(2), 1993, pp. 159-167
Risultati: 1-11 |