Citation: Ai. Ryabchikov et Ib. Stepanov, INVESTIGATIONS OF FORMING METAL-PLASMA FLOWS FILTERED FROM MICROPARTICLE FRACTION IN VACUUM-ARC EVAPORATORS, Review of scientific instruments, 69(2), 1998, pp. 810-812
Authors:
RYABCHIKOV AI
STEPANOV IB
DEKTJAREV SV
SERGEEV OV
Citation: Ai. Ryabchikov et al., VACUUM-ARC ION AND PLASMA SOURCE RADUGA-5 FOR MATERIALS TREATMENT, Review of scientific instruments, 69(2), 1998, pp. 893-895