Authors:
STRASS A
HANSCH W
KAESEN F
FEHLAUER G
BIERINGER P
FISCHER A
EISELE I
Citation: A. Strass et al., LOW-TEMPERATURE ELECTRICAL SURFACE PASSIVATION OF MBE-GROWN PIN DIODES BY HYDROGEN AND OXYGEN PLASMA PROCESSES, Thin solid films, 321, 1998, pp. 261-264
Authors:
STRASS A
HANSCH W
BIERINGER P
NEUBECKER A
KAESEN F
FISCHER A
EISELE I
Citation: A. Strass et al., ETCHING CHARACTERISTICS OF SI AND SIO2 WITH A LOW-ENERGY ARGON HYDROGEN DC PLASMA SOURCE/, Surface & coatings technology, 97(1-3), 1997, pp. 158-162