Authors: NOVIKOV YA RAKOV AV STRIZHKOV IB SEDOV SV

Citation: Ya. Novikov et al., LINEAR MEASUREMENTS IN SUBMICRON RANGE ON SEM, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 60(2), 1996, pp. 105-111

Authors: NOVIKOV YA PESHEKHONOV SV RAKOV AV SIMONOV AN STEKOLIN IY STRIZHKOV IB TSYBULSKII VV

Citation: Ya. Novikov et al., CALIBRATION OF SCANNING ELECTRON-MICROSCOPES FOR MEASURING THE DIMENSIONS OF SUBMICRON RELIEF ELEMENTS, Measurement techniques, 36(8), 1993, pp. 947-950

Authors: NOVIKOV YA RAKOV AV STEKOLIN IY STRIZHKOV IB

Citation: Ya. Novikov et al., DETERMINATION OF THE DIAMETER OF THE ELECTRON-PROBE OF A SCANNING ELECTRON-MICROSCOPE, Measurement techniques, 36(12), 1993, pp. 1348-1350

Authors: NOVIKOV YA RAKOV AV SIMONOV AN STECOLIN IY STRIZHKOV IB

Citation: Ya. Novikov et al., INTERACTION OF SECONDARY EMISSIVE ELECTRO NS WITH RELIEF SURFACE, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 57(8), 1993, pp. 67-72

Authors: NOVIKOV YA RAKOV AV STECOLIN IY STRIZHKOV IB TSYBULSKY VV

Citation: Ya. Novikov et al., MECHANISMS OF VIDEO PROFILE FORMATION IN SEM, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 57(8), 1993, pp. 73-78

Authors: NOVIKOV YA PESHEKHONOV SV RAKOV AV SEDOV SV SIMONOV AN STECOLIN IY STRIZHKOV IB

Citation: Ya. Novikov et al., THE DETERMINATION OF MAIN SEM PARAMETERS USING OF SLIT-LIKE SILICON SUBMICRON STRUCTURES, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 57(8), 1993, pp. 84-93