Authors: SURBLED P DUFOURGERGAM E GILLES JP GRANDCHAMP JP

Citation: P. Surbled et al., RIBE OF 10-MU-M THICK ALUMINUM FILMS FOR MICROELECTROMECHANICAL DEVICES, Journal of micromechanics and microengineering, 7(3), 1997, pp. 104-107

Authors: SURBLED P DUFOURGERGAM E BOSSEBOEUF A GILLES JP GRANDCHAMP JP

Citation: P. Surbled et al., IMPROVEMENT OF A CLASSICAL ELECTRODEPOSITION PROCESS FOR ELECTROSTATIC VARIABLE-CAPACITANCE, SIDE-DRIVE MICROMOTOR FABRICATION, Journal of micromechanics and microengineering, 6(1), 1996, pp. 42-45