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Results: 2

Authors: Zschech, E Engelmann, HJ Saage, H de Robillard, Q Stegmann, H
Citation: E. Zschech et al., Characterization of layer stacks in microelectronic products: Challenges to sample preparation and TEM analysis, PRAKT METAL, 38(8), 2001, pp. 442-453

Authors: Engelmann, HJ Saage, H Zschech, E
Citation: Hj. Engelmann et al., Application of analytical TEM for failure analysis of semiconductor devicestructures, MICROEL REL, 40(8-10), 2000, pp. 1747-1751
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