Results: 1-5 |
Results: 5
Effects of ion irradiation on silicon oxidation in electron cyclotron resonance argon and oxygen mixed plasma
Authors: Matsuo, S Yamamoto, M Sadoh, T Tsurushima, T Gao, DW Furukawa, K Nakashima, H
Citation: S. Matsuo et al., Effects of ion irradiation on silicon oxidation in electron cyclotron resonance argon and oxygen mixed plasma, J APPL PHYS, 88(3), 2000, pp. 1664-1669
High-perfomance MOS tunneling cathode with CoSi2 gate electrode
Authors: Sadoh, T Zhang, YQ Yasunaga, H Kenjo, A Tsurushima, T Miyao, M
Citation: T. Sadoh et al., High-perfomance MOS tunneling cathode with CoSi2 gate electrode, JPN J A P 1, 40(4B), 2001, pp. 2775-2778
Ion-beam modification of TiO2 film to multilayered photocatalyst
Authors: Sumita, T Otsuka, H Kubota, H Nagata, M Honda, Y Miyagawa, R Tsurushima, T Sadoh, T
Citation: T. Sumita et al., Ion-beam modification of TiO2 film to multilayered photocatalyst, NUCL INST B, 148(1-4), 1999, pp. 758-761
Ion-beam stimulated solid-phase crystallization of amorphous Si on SiO2
Authors: Miyao, M Tsunoda, I Sadoh, T Kenjo, A
Citation: M. Miyao et al., Ion-beam stimulated solid-phase crystallization of amorphous Si on SiO2, THIN SOL FI, 383(1-2), 2001, pp. 104-106
Thin CoSi2 formation on SiO2 with low-energy ion irradiation
Authors: Matsushita, A Sadoh, T Tsurushima, T
Citation: A. Matsushita et al., Thin CoSi2 formation on SiO2 with low-energy ion irradiation, JPN J A P 1, 37(11), 1998, pp. 6117-6122
Risultati: 1-5 |