Authors: Samper, VD Sangster, AJ Reuben, RL Wallrabe, U

Citation: Vd. Samper et al., Torque evaluation of a LIGA fabricated electrostatic micromotor, J MICROEL S, 8(1), 1999, pp. 115-123

Authors: Samper, VD Sangster, AJ Wallrabe, U Reuben, RL Grund, JK

Citation: Vd. Samper et al., Advanced LIGA technology for the integration of an electrostatically controlled bearing in a wobble micromotor, J MICROEL S, 7(4), 1998, pp. 423-427