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Results:
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Results: 6
The silicon angular rate sensor system DAVED (R)
Authors:
Geiger, W Merz, J Fischer, T Folkmer, B Sandmaier, H Lang, W
Citation:
W. Geiger et al., The silicon angular rate sensor system DAVED (R), SENS ACTU-A, 84(3), 2000, pp. 280-284
A mechanically controlled oscillator
Authors:
Geiger, W Sandmaier, H Lang, W
Citation:
W. Geiger et al., A mechanically controlled oscillator, SENS ACTU-A, 82(1-3), 2000, pp. 74-78
Improved simulation for strongly coupled micro-electro-mechanical systems:resonant vacuum sensor optimization
Authors:
Folkmer, B Siber, A Bley, WG Sandmaier, H Lang, W
Citation:
B. Folkmer et al., Improved simulation for strongly coupled micro-electro-mechanical systems:resonant vacuum sensor optimization, SENS ACTU-A, 74(1-3), 1999, pp. 190-192
Thermal flow sensor for liquids and gases based on combinations of two principles
Authors:
Ashauer, M Glosch, H Hedrich, F Hey, N Sandmaier, H Lang, W
Citation:
M. Ashauer et al., Thermal flow sensor for liquids and gases based on combinations of two principles, SENS ACTU-A, 73(1-2), 1999, pp. 7-13
A new silicon rate gyroscope
Authors:
Geiger, W Folkmer, B Merz, J Sandmaier, H Lang, W
Citation:
W. Geiger et al., A new silicon rate gyroscope, SENS ACTU-A, 73(1-2), 1999, pp. 45-51
Micro electro mechanical systems: From research to applications
Authors:
Lang, W Sandmaier, H
Citation:
W. Lang et H. Sandmaier, Micro electro mechanical systems: From research to applications, JPN J A P 1, 37(12B), 1998, pp. 7047-7051
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