Authors: Winkelmeier, S Sarstedt, M Ereken, M Goethals, M Ronse, K

Citation: S. Winkelmeier et al., Metrology method for the correlation of line edge roughness for different resists before and after etch, MICROEL ENG, 57-8, 2001, pp. 665-672

Authors: Rangelov, V Sarstedt, M Somerville, J Marschner, T Jonckheere, R Poelaert, A

Citation: V. Rangelov et al., Exploring capabilities of electrical linewidth measurement (ELM) techniques, MICROEL ENG, 57-8, 2001, pp. 673-681