Authors:
Karouta, F
Jacobs, B
Vreugdewater, P
van Melick, NGH
Schoen, O
Protzmann, H
Heuken, M
Citation: F. Karouta et al., High etch rate and smooth morphology using a novel chemistry in reactive ion etching of GaN, EL SOLID ST, 2(5), 1999, pp. 240-241
Citation: F. Karouta et al., Chemical and complementary role of fluorine in a chlorine-based reactive ion etching of GaN, PHYS ST S-A, 176(1), 1999, pp. 755-758
Authors:
Schwambera, M
Schoen, O
Schineller, B
Schmitz, D
Heuken, M
Citation: M. Schwambera et al., Investigation of GaInN films and development of double-hetero (DH) structures for blue and green light emitters, J CRYST GR, 203(3), 1999, pp. 340-348