Authors:
Knoch, J
Appenzeller, J
Lengeler, B
Martel, R
Solomon, P
Avouris, P
Dieker, C
Lu, Y
Wang, KL
Scholvin, J
del Alamo, JA
Citation: J. Knoch et al., Technology for the fabrication of ultrashort channel metal-oxide-semiconductor field-effect transistors, J VAC SCI A, 19(4), 2001, pp. 1737-1741