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Witvrouw, A
Saerens, A
Van Houtte, P
Poortmans, J
Baert, K
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Authors:
Witvrouw, A
Van Steenkiste, F
Maes, D
Haspeslagh, L
Van Gerwen, P
De Moor, P
Sedky, S
Van Hoof, C
de Vries, AC
Verbist, A
De Caussemaeker, A
Parmentier, B
Baert, K
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Authors:
Sedky, S
Fiorini, P
Caymax, M
Loreti, S
Baert, K
Hermans, L
Mertens, R
Citation: S. Sedky et al., Structural and mechanical properties of polycrystalline silicon germanium for micromachining applications, J MICROEL S, 7(4), 1998, pp. 365-372