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Results:
1-14
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Results: 14
Authors:
Kuratani, N
Ebe, A
Ogata, K
Shimizu, I
Setsuhara, Y
Miyake, S
Citation: N. Kuratani et al., Fundamental study of ion-irradiation effects on the columnar growth of chromium films prepared by ion-beam and vapor deposition, J VAC SCI A, 19(1), 2001, pp. 153-157
Authors:
Setsuhara, Y
Sakawa, Y
Shoji, T
Kumagai, M
Mikaye, S
Citation: Y. Setsuhara et al., Synthesis of carbon nitride films by high-density helicon wave-excited plasma sputtering, SURF COAT, 142, 2001, pp. 874-880
Authors:
He, JL
Setsuhara, Y
Shimizu, I
Miyake, S
Citation: Jl. He et al., Structure refinement and hardness enhancement of titanium nitride films byaddition of copper, SURF COAT, 137(1), 2001, pp. 38-42
Authors:
Setsuhara, Y
Miyake, S
Sakawa, Y
Shoji, T
Citation: Y. Setsuhara et al., Development of internal-antenna-driven large-volume RF plasma sources for plasma-based ion implantation, SURF COAT, 136(1-3), 2001, pp. 60-64
Authors:
He, JL
Miyake, S
Setsuhara, Y
Shimizu, I
Suzuki, M
Numata, K
Saito, H
Citation: Jl. He et al., Improved anti-wear performance of nanostructured titanium boron nitride coatings, WEAR, 249(5-6), 2001, pp. 498-502
Authors:
Shimizu, I
Setsuhara, Y
Miyake, S
Saitou, H
Kumagai, M
Citation: I. Shimizu et al., Effects of ion-beam-irradiation on morphology and densification of CeO2 films prepared by ion-beam-assisted deposition, JPN J A P 1, 39(7A), 2000, pp. 4138-4142
Authors:
Miyake, S
Setsuhara, Y
Sakawa, Y
Shoji, T
Citation: S. Miyake et al., Development of high-density RF plasma and application to PVD, SURF COAT, 131(1-3), 2000, pp. 171-176
Authors:
Shimizu, I
Setsuhara, Y
Miyake, S
Kumagai, M
Ogata, K
Kohata, M
Yamaguchi, K
Citation: I. Shimizu et al., Preparation of aluminum oxide films by ion beam assisted deposition, SURF COAT, 131(1-3), 2000, pp. 187-191
Authors:
Miyake, S
Setsuhara, Y
Sakawa, Y
Shoji, T
Citation: S. Miyake et al., Internal-antenna-driven inductive RF discharges for development of large-area high-density plasma sources with suppressed electrostatic coupling, VACUUM, 59(2-3), 2000, pp. 472-478
Authors:
Matsuoka, M
Isotani, S
Chubaci, JFD
Miyake, S
Setsuhara, Y
Ogata, K
Kuratani, N
Citation: M. Matsuoka et al., Influence of ion energy and arrival rate on x-ray crystallographic properties of thin ZrOx films prepared on Si(111) substrate by ion-beam assisted deposition, J APPL PHYS, 88(6), 2000, pp. 3773-3775
Authors:
Setsuhara, Y
Miyake, S
Sakawa, Y
Shoji, T
Citation: Y. Setsuhara et al., Production of inductively-coupled large-diameter plasmas with internal antenna, JPN J A P 1, 38(7B), 1999, pp. 4263-4267
Authors:
Yamashita, M
Setsuhara, Y
Miyake, S
Kumagai, M
Shoji, T
Musil, J
Citation: M. Yamashita et al., Studies on magnetron sputtering assisted by inductively coupled RF plasma for enhanced metal ionization, JPN J A P 1, 38(7B), 1999, pp. 4291-4295
Authors:
Miyake, S
Setsuhara, Y
Shibata, K
Kumagai, M
Sakawa, Y
Shoji, T
Citation: S. Miyake et al., Formation of carbon nitride films by reactive high-density plasma sputtering with excitation of m=0 mode helicon wave, SURF COAT, 119, 1999, pp. 11-17
Authors:
Setsuhara, Y
Kumagai, M
Suzuki, M
Suzuki, T
Miyake, S
Citation: Y. Setsuhara et al., Properties of cubic boron nitride films with buffer layer control for stress relaxation using ion-beam-assisted deposition, SURF COAT, 119, 1999, pp. 100-107
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