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Authors: Pey, KL Sundaresan, R Wong, H Siah, SY Tung, CH

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Citation: Cl. Gan et al., Effects of high current conduction in sub-micron Ti-silicided films, SOL ST ELEC, 44(10), 2000, pp. 1837-1845

Authors: Chua, HN Pey, KL Lai, WH Siah, SY

Citation: Hn. Chua et al., Formation of voids in Ti-salicided BF2+-doped submicron polysilicon lines, J APPL PHYS, 87(12), 2000, pp. 8401-8406