Authors:
Smy, T
Vick, D
Brett, MJ
Dew, SK
Wu, AT
Sit, JC
Harris, KD
Citation: T. Smy et al., Three-dimensional simulation of film microstructure produced by glancing angle deposition, J VAC SCI A, 18(5), 2000, pp. 2507-2512
Authors:
Elezzabi, AY
Sit, JC
Holzman, JF
Robbie, K
Brett, MJ
Citation: Ay. Elezzabi et al., Thin film vertical diffraction gratings fabricated using glancing angle deposition, ELECTR LETT, 35(6), 1999, pp. 491-493