Citation: T. Smy et al., Efficient modeling of thin film deposition for low sticking using a three-dimensional microstructural simulator, J VAC SCI A, 19(1), 2001, pp. 251-261
Citation: T. Smy et al., Transient 3D heat flow analysis for integrated circuit devices using the transmission line matrix method on a quad tree mesh, SOL ST ELEC, 45(7), 2001, pp. 1137-1148
Authors:
Reimer, CJ
Smy, T
Walkey, DJ
Beggs, BC
Surridge, R
Citation: Cj. Reimer et al., A simulation study of IC layout effects on thermal management of die attached GaAsICs, IEEE T COMP, 23(2), 2000, pp. 341-351
Citation: M. Li et al., Kinetic simulation of metal chemical-vapor deposition on high aspect ratiofeatures in modern very-large-scale-integrated processing, J VAC SCI B, 18(3), 2000, pp. 1343-1347
Authors:
Smy, T
Vick, D
Brett, MJ
Dew, SK
Wu, AT
Sit, JC
Harris, KD
Citation: T. Smy et al., Three-dimensional simulation of film microstructure produced by glancing angle deposition, J VAC SCI A, 18(5), 2000, pp. 2507-2512
Authors:
Vick, D
Friedrich, LJ
Dew, SK
Brett, MJ
Robbie, K
Seto, M
Smy, T
Citation: D. Vick et al., Self-shadowing and surface diffusion effects in obliquely deposited thin films (vol 339, pg 88, 1999), THIN SOL FI, 349(1-2), 1999, pp. 303-303
Authors:
Smy, T
Joshi, RV
Tait, N
Dew, SK
Brett, MJ
Citation: T. Smy et al., An analysis of the role of high energy neutral bombardment in longthrow/collimated sputtering of refractory metal barrier layers, J APPL PHYS, 84(9), 1998, pp. 5315-5325