Authors: Steffens, KL Crosley, DR

Citation: Kl. Steffens et Dr. Crosley, Vibrational energy transfer in OH A(2)Sigma(+) between 195 and 295 K, J CHEM PHYS, 112(21), 2000, pp. 9427-9432

Authors: Sobolewski, MA Steffens, KL

Citation: Ma. Sobolewski et Kl. Steffens, Electrical control of the spatial uniformity of reactive species in plasmas, J VAC SCI A, 17(6), 1999, pp. 3281-3292

Authors: Steffens, KL Sobolewski, MA

Citation: Kl. Steffens et Ma. Sobolewski, Planar laser-induced fluorescence of CF2 in O-2/CF4 and O-2/C2F6 chamber-cleaning plasmas: Spatial uniformity and comparison to electrical measurements, J VAC SCI A, 17(2), 1999, pp. 517-527

Authors: Steffens, KL Sobolewski, MA

Citation: Kl. Steffens et Ma. Sobolewski, Electrical control of plasma spatial uniformity investigated by planar laser-induced fluorescence, IEEE PLAS S, 27(1), 1999, pp. 74-75