Authors:
Xiao, X
Streiter, R
Wolf, H
Ruan, G
Murray, C
Gessner, T
Citation: X. Xiao et al., Simulation of the dielectric constant of aerogels and estimation of their water content, MICROEL ENG, 55(1-4), 2001, pp. 53-57
Authors:
Otto, T
Wolf, H
Streiter, R
Dehoff, A
Wandel, K
Gessner, T
Citation: T. Otto et al., Process and equipment simulation of dry silicon etching in the absence of ion bombardment, MICROEL ENG, 45(4), 1999, pp. 377-391