Authors:
Barth, W
Debski, T
Abedinov, N
Ivanov, T
Heerlein, H
Volland, B
Gotszalk, T
Rangelow, IW
Torkar, K
Fritzenwallner, K
Grabiec, P
Studzinska, K
Kostic, I
Hudek, P
Citation: W. Barth et al., Evaluation and fabrication of AFM array for ESA-Midas /Rosetta space mission, MICROEL ENG, 57-8, 2001, pp. 825-831
Authors:
Barth, W
Debski, T
Shi, F
Hudek, P
Kostic, I
Rangelow, IW
Biehl, S
Iwert, T
Grabiec, P
Studzinska, K
Mitura, S
Bekh, II
Lushkin, AE
Il'chenko, LG
Il'chenko, VV
Haindl, G
Citation: W. Barth et al., Field emission cathode array with self-aligned gate electrode fabricated by silicon micromachining, J VAC SCI B, 18(6), 2000, pp. 3544-3548