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Results:
1-3
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Results: 3
Evaluation of a new X-ray stepper XRA
Authors:
Suita, M Mitsui, S Sumitani, H Aoyama, H Taguchi, T Matsui, Y
Citation:
M. Suita et al., Evaluation of a new X-ray stepper XRA, MICROEL ENG, 57-8, 2001, pp. 17-21
Overlay performance of SR lithography in 64M DRAM layers
Authors:
Sumitani, H Suita, M Hifumi, T Watanabe, H Yabe, H Itoga, K Aya, S Marumoto, K Matsui, Y
Citation:
H. Sumitani et al., Overlay performance of SR lithography in 64M DRAM layers, MICROEL ENG, 53(1-4), 2000, pp. 587-590
Alignment mark optimization to reduce tool- and wafer-induced shift for XRA-1000
Authors:
Ina, H Sentoku, K Matsumoto, T Sumitani, H Suita, M
Citation:
H. Ina et al., Alignment mark optimization to reduce tool- and wafer-induced shift for XRA-1000, JPN J A P 1, 38(12B), 1999, pp. 7065-7070
Risultati:
1-3
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