Authors: TAS N WISSINK J SANDER L LAMMERINK T ELWENSPOEK M

Citation: N. Tas et al., MODELING, DESIGN AND TESTING OF THE ELECTROSTATIC SHUFFLE MOTOR, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 171-178

Authors: JANSEN H DEBOER M WIEGERINK R TAS N SMULDERS E NEAGU C ELWENSPOEK M

Citation: H. Jansen et al., RIE LAG IN HIGH-ASPECT-RATIO TRENCH ETCHING OF SILICON, Microelectronic engineering, 35(1-4), 1997, pp. 45-50

Authors: TAS N SONNENBERG T JANSEN H LEGTENBERG R ELWENSPOEK M

Citation: N. Tas et al., STICTION IN SURFACE MICROMACHINING, Journal of micromechanics and microengineering, 6(4), 1996, pp. 385-397