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Authors: TELFEYAN R MOYNE J CHAUDHRY N PUGMIRE J SHELLMAN S BONING D MOYNE W HURWITZ A TAYLOR J
Citation: R. Telfeyan et al., A MULTILEVEL APPROACH TO THE CONTROL OF A CHEMICAL-MECHANICAL PLANARIZATION PROCESS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(3), 1996, pp. 1907-1913

Authors: MOYNE JR CHAUDHRY N TELFEYAN R
Citation: Jr. Moyne et al., ADAPTIVE EXTENSIONS TO A MULTIBRANCH RUN-TO-RUN CONTROLLER FOR PLASMA-ETCHING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 1787-1791
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