Authors:
TELFEYAN R
MOYNE J
CHAUDHRY N
PUGMIRE J
SHELLMAN S
BONING D
MOYNE W
HURWITZ A
TAYLOR J
Citation: R. Telfeyan et al., A MULTILEVEL APPROACH TO THE CONTROL OF A CHEMICAL-MECHANICAL PLANARIZATION PROCESS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(3), 1996, pp. 1907-1913
Citation: Jr. Moyne et al., ADAPTIVE EXTENSIONS TO A MULTIBRANCH RUN-TO-RUN CONTROLLER FOR PLASMA-ETCHING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 1787-1791