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Results: 1-8 |
Results: 8
ANISOTROPIC ETCHING OF SILICON-CRYSTALS IN KOH SOLUTION - PART III - EXPERIMENTAL AND THEORETICAL SHAPES FOR 3D STRUCTURES MICRO-MACHINED IN (HK0) PLATES
Authors: TELLIER CR
Citation: Cr. Tellier, ANISOTROPIC ETCHING OF SILICON-CRYSTALS IN KOH SOLUTION - PART III - EXPERIMENTAL AND THEORETICAL SHAPES FOR 3D STRUCTURES MICRO-MACHINED IN (HK0) PLATES, Journal of Materials Science, 33(1), 1998, pp. 117-131
DETERMINATION OF THE DISSOLUTION SLOWNESS SURFACE BY STUDY OF ETCHED SHAPES .2. COMPARISON OF 2D EXPERIMENTAL AND THEORETICAL ETCHING SHAPES
Authors: LEBLOIS T TELLIER CR MESSAOUDI T
Citation: T. Leblois et al., DETERMINATION OF THE DISSOLUTION SLOWNESS SURFACE BY STUDY OF ETCHED SHAPES .2. COMPARISON OF 2D EXPERIMENTAL AND THEORETICAL ETCHING SHAPES, Journal de physique. III, 7(3), 1997, pp. 575-607
CHEMICAL ETCHING OF Y-ROTATED QUARTZ PLATES - EXPERIMENTS AND THEORETICAL APPROACH
Authors: LEBLOIS T TELLIER CR MESSAOUDI T
Citation: T. Leblois et al., CHEMICAL ETCHING OF Y-ROTATED QUARTZ PLATES - EXPERIMENTS AND THEORETICAL APPROACH, Sensors and actuators. A, Physical, 61(1-3), 1997, pp. 405-414
MICROMACHINING OF (HHL) SILICON STRUCTURES - EXPERIMENTS AND 3D SIMULATION OF ETCHED SHAPES
Authors: TELLIER CR DURAND S
Citation: Cr. Tellier et S. Durand, MICROMACHINING OF (HHL) SILICON STRUCTURES - EXPERIMENTS AND 3D SIMULATION OF ETCHED SHAPES, Sensors and actuators. A, Physical, 60(1-3), 1997, pp. 168-175
LINEAR AND NONLINEAR PIEZORESISTANCE COEFFICIENTS IN CUBIC SEMICONDUCTORS .1. THEORETICAL FORMULATIONS
Authors: DURAND S TELLIER CR
Citation: S. Durand et Cr. Tellier, LINEAR AND NONLINEAR PIEZORESISTANCE COEFFICIENTS IN CUBIC SEMICONDUCTORS .1. THEORETICAL FORMULATIONS, Journal de physique. III, 6(2), 1996, pp. 237-266
ANISOTROPIC ETCHING OF SILICON-CRYSTALS IN KOH SOLUTION .2. THEORETICAL 2-DIMENSIONAL ETCHED SHAPES - DISCUSSION OF THE ADEQUATION OF THE DISSOLUTION SLOWNESS SURFACE
Authors: TELLIER CR BRAHIMBOUNAB A
Citation: Cr. Tellier et A. Brahimbounab, ANISOTROPIC ETCHING OF SILICON-CRYSTALS IN KOH SOLUTION .2. THEORETICAL 2-DIMENSIONAL ETCHED SHAPES - DISCUSSION OF THE ADEQUATION OF THE DISSOLUTION SLOWNESS SURFACE, Journal of Materials Science, 29(24), 1994, pp. 6354-6378
ANISOTROPIC ETCHING OF SILICON-CRYSTALS IN KOH SOLUTION .1. EXPERIMENTAL ETCHED SHAPES AND DETERMINATION OF THE DISSOLUTION SLOWNESS SURFACE
Authors: TELLIER CR BRAHIMBOUNAB A
Citation: Cr. Tellier et A. Brahimbounab, ANISOTROPIC ETCHING OF SILICON-CRYSTALS IN KOH SOLUTION .1. EXPERIMENTAL ETCHED SHAPES AND DETERMINATION OF THE DISSOLUTION SLOWNESS SURFACE, Journal of Materials Science, 29(22), 1994, pp. 5953-5971
SCRATCHING EXPERIMENTS ON QUARTZ CRYSTALS - ORIENTATION EFFECTS IN CHIPPING
Authors: TELLIER CR BENMESSAOUDA D
Citation: Cr. Tellier et D. Benmessaouda, SCRATCHING EXPERIMENTS ON QUARTZ CRYSTALS - ORIENTATION EFFECTS IN CHIPPING, Journal of Materials Science, 29(12), 1994, pp. 3281-3294
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