Authors: SCHEITER T KAPELS H OPPERMANN KG STEGER M HIEROLD C WERNER WM TIMME HJ

Citation: T. Scheiter et al., FULL INTEGRATION OF A PRESSURE-SENSOR SYSTEM INTO A STANDARD BICMOS PROCESS, Sensors and actuators. A, Physical, 67(1-3), 1998, pp. 211-214

Authors: COPEL M TROMP RM TIMME HJ PENNER K NAKAO T

Citation: M. Copel et al., EFFECTS OF SURFACE OXIDE ON THE RAPID THERMAL NITRIDATION OF SI(001), Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(2), 1996, pp. 462-464

Authors: STENGL R TIMME HJ MANDELMAN JA BENEDICT J ACKER B

Citation: R. Stengl et al., HIGH-PRESSURE OXIDATION-INDUCED STRESS IN SUBMICRON TRENCH STRUCTURES, Applied physics letters, 68(20), 1996, pp. 2843-2845

Authors: MULLER KP ROITHNER K TIMME HJ

Citation: Kp. Muller et al., SELECTIVITY AND SI-LOAD IN DEEP TRENCH ETCHING, Microelectronic engineering, 27(1-4), 1995, pp. 457-462