Citation: T. Haga et Mck. Tinone, ASSEMBLY OF EXTREME-ULTRAVIOLET LITHOGRAPHY OPTICS USING AT-WAVELENGTH FOUCAULT TESTING, JPN J A P 1, 35(12B), 1996, pp. 6480-6486
Authors:
UENO N
KAMIYA K
HARADA Y
TINONE MCK
SEKITANI T
TANAKA K
Citation: N. Ueno et al., SYNCHROTRON-RADIATION AS A SCALPEL FOR MOLECULAR-SYSTEMS - EVIDENCE OF SITE-SPECIFIC CHEMICAL-BOND SCISSION OF PMMA BY OXYGEN IS ELECTRON-EXCITATION, Optoelectronics, 11(1), 1996, pp. 91-98
Authors:
TINONE MCK
UENO N
MARUYAMA J
KAMIYA K
HARADA Y
SEKITANI T
TANAKA K
Citation: Mck. Tinone et al., SITE-SPECIFIC PHOTOCHEMICAL-REACTION OF PMMA AND RELATED POLYMERS BY INNER-SHELL ELECTRON-EXCITATION, Journal of electron spectroscopy and related phenomena, 80, 1996, pp. 117-120
Citation: Mck. Tinone et al., MULTILAYER SPUTTER-DEPOSITION STRESS-CONTROL, Journal of electron spectroscopy and related phenomena, 80, 1996, pp. 461-464
Citation: T. Haga et al., LARGE-FIELD (GREATER-THAN-20X25 MM(2)) REPLICATION BY EUV LITHOGRAPHY, Microelectronic engineering, 30(1-4), 1996, pp. 179-182
Citation: Mck. Tinone et al., PHOTODECOMPOSITION OF POLY(METHYLMETHACRYLATE) THIN-FILMS BY MONOCHROMATIC SOFT-X-RAY RADIATION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(4), 1995, pp. 1885-1892
Authors:
TANAKA K
TINONE MCK
IKEURA H
SEKIGUCHI T
SEKITANI T
Citation: K. Tanaka et al., PHOTON-STIMULATED ION DESORPTION STUDIES USING PULSED SYNCHROTRON-RADIATION, Review of scientific instruments, 66(2), 1995, pp. 1474-1476
Authors:
IBUKI T
HORIE Y
KAMIUCHI A
MORIMOTO Y
TINONE MCK
TANAKA K
HONMA K
Citation: T. Ibuki et al., RADIATIVE DISSOCIATION OF C2H2, C2HD, AND C2D2 SUPEREXCITED AT 50-90 NM REGION, The Journal of chemical physics, 102(13), 1995, pp. 5301-5308
Authors:
TINONE MCK
SEKITANI T
TANAKA K
MARUYAMA J
UENO N
Citation: Mck. Tinone et al., SITE-SPECIFIC PHOTOCHEMICAL-REACTION BY CORE ELECTRON-EXCITATION - CARBON AND OXYGEN K-EDGE FINE-STRUCTURE OF PMMA, Applied surface science, 80, 1994, pp. 89-94
Authors:
TINONE MCK
TANAKA K
MARUYAMA J
UENO N
IMAMURA M
MATSUBAYASHI N
Citation: Mck. Tinone et al., INNER-SHELL EXCITATION AND SITE-SPECIFIC FRAGMENTATION OF POLY(METHYLMETHACRYLATE) THIN-FILM, The Journal of chemical physics, 100(8), 1994, pp. 5988-5995