Citation: K. Hayama et al., HETEROEPITAXIAL GROWTH OF AL2O3 FILM ON SI USING DIMETHYLETHYLAMINE-ALANE AND O-2, Journal of crystal growth, 179(3-4), 1997, pp. 433-437
Citation: K. Hayama et al., HETEROEPITAXIAL GROWTH OF AL FILM ON SI USING DIMETHYLETHYLAMINE-ALANE, Journal of crystal growth, 179(3-4), 1997, pp. 438-443