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Authors: HAYAMA K TOGUN T ISHIDA M
Citation: K. Hayama et al., HETEROEPITAXIAL GROWTH OF AL2O3 FILM ON SI USING DIMETHYLETHYLAMINE-ALANE AND O-2, Journal of crystal growth, 179(3-4), 1997, pp. 433-437

Authors: HAYAMA K TOGUN T ISHIDA M
Citation: K. Hayama et al., HETEROEPITAXIAL GROWTH OF AL FILM ON SI USING DIMETHYLETHYLAMINE-ALANE, Journal of crystal growth, 179(3-4), 1997, pp. 438-443
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