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Results:
1-23
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Results: 23
Authors:
TUDA M
ONO K
Citation: M. Tuda et K. Ono, NEW-TYPE MICROWAVE PLASMA SOURCE EXCITED BY AZIMUTHALLY SYMMETRICAL SURFACE-WAVES WITH MAGNETIC MULTICUSP FIELDS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(5), 1998, pp. 2832-2839
Authors:
BANJO T
TSUCHIHASHI M
HANAZAKI M
TUDA M
ONO K
Citation: T. Banjo et al., EFFECTS OF O-2 ADDITION ON BCL3 CL-2 PLASMA CHEMISTRY FOR AL ETCHING/, JPN J A P 1, 36(7B), 1997, pp. 4824-4828
Authors:
ONO K
TUDA M
Citation: K. Ono et M. Tuda, PROFILE EVOLUTION DURING COLD-PLASMA BEAM ETCHING OF SILICON, JPN J A P 1, 36(7B), 1997, pp. 4854-4865
Authors:
TUDA M
ONO K
Citation: M. Tuda et K. Ono, MECHANISMS FOR MICROSCOPIC NONUNIFORMITY IN LOW-PRESSURE, HIGH-DENSITY PLASMA-ETCHING OF POLY-SI IN CL-2 AND CL-2 O-2 MIXTURES/, JPN J A P 1, 36(4B), 1997, pp. 2482-2490
Authors:
TUDA M
ONO K
Citation: M. Tuda et K. Ono, OBSERVATION OF MICROSCOPIC NONUNIFORMITY DURING OVERETCH IN POLYSILICON GATE ETCHING, JPN J A P 2, 36(4B), 1997, pp. 518-521
Authors:
TUDA M
NISHIKAWA K
ONO K
Citation: M. Tuda et al., NUMERICAL STUDY OF THE ETCH ANISOTROPY IN LOW-PRESSURE, HIGH-DENSITY PLASMA-ETCHING, Journal of applied physics, 81(2), 1997, pp. 960-967
Authors:
TUDA M
ONO K
Citation: M. Tuda et K. Ono, PROFILE EVOLUTION DURING PULSED PLASMA-ETCHING, JPN J A P 2, 35(10B), 1996, pp. 1374-1377
Authors:
TUDA M
ONO K
NISHIKAWA K
Citation: M. Tuda et al., EFFECTS OF ETCH PRODUCTS AND SURFACE OXIDATION ON PROFILE EVOLUTION DURING ELECTRON-CYCLOTRON-RESONANCE PLASMA-ETCHING OF POLY-SI, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(5), 1996, pp. 3291-3298
Authors:
ITO S
TATENO C
TUDA M
YOSHITAKE A
Citation: S. Ito et al., IMMUNOHISTOCHEMICAL DEMONSTRATION OF THE GAP JUNCTIONAL PROTEIN CONNEXIN-32 AND PROLIFERATING CELL NUCLEAR ANTIGEN IN GLUTATHIONE-S-TRANSFERASE PLACENTAL FORM-NEGATIVE LESIONS OF RAT-LIVER INDUCED BY DIETHYLNITROSAMINE AND CLOFIBRATE, Toxicologic pathology, 24(6), 1996, pp. 690-695
Authors:
TUDA M
Citation: M. Tuda, TEMPORAL SPATIAL STRUCTURE AND THE DYNAMICAL PROPERTY OF LABORATORY HOST-PARASITOID SYSTEMS/, Researches on population ecology, 38(2), 1996, pp. 133-140
Authors:
SHIMADA M
TUDA M
Citation: M. Shimada et M. Tuda, DELAYED DENSITY-DEPENDENCE AND OSCILLATORY POPULATION-DYNAMICS IN OVERLAPPING-GENERATION SYSTEMS OF A SEED BEETLE CALLOSOBRUCHUS-CHINENSIS - MATRIX POPULATION-MODEL, Oecologia, 105(1), 1996, pp. 116-125
Authors:
NISHIKAWA K
ONO K
TUDA M
OOMORI T
NAMBA K
Citation: K. Nishikawa et al., IN-SITU MONITORING OF PRODUCT SPECIES IN PLASMA-ETCHING BY FOURIER-TRANSFORM INFRARED-ABSORPTION SPECTROSCOPY, JPN J A P 1, 34(7A), 1995, pp. 3731-3736
Authors:
TUDA M
SHIMADA M
Citation: M. Tuda et M. Shimada, DEVELOPMENTAL SCHEDULES AND PERSISTENCE OF EXPERIMENTAL HOST-PARASITOID SYSTEMS AT 2 DIFFERENT TEMPERATURES, Oecologia, 103(3), 1995, pp. 283-291
Authors:
TUDA M
FUKATSU T
SHIMADA M
Citation: M. Tuda et al., SPECIES DIFFERENTIATION OF BRUCHID BEETLES (COLEOPTERA, BRUCHIDAE) ANALYZED BY MITOCHONDRIAL-DNA POLYMORPHISM, Applied Entomology and Zoology, 30(2), 1995, pp. 377-380
Authors:
OOTERA H
OOMORI T
TUDA M
NAMBA K
Citation: H. Ootera et al., SIMULATION OF ION TRAJECTORIES NEAR SUBMICRON-PATTERNED SURFACE INCLUDING EFFECTS OF LOCAL CHARGING AND ION DRIFT VELOCITY TOWARD A WAFER, JPN J A P 1, 33(7B), 1994, pp. 4276-4280
Authors:
ONO K
TUDA M
NISHIKAWA K
OOMORI T
NAMBA K
Citation: K. Ono et al., CHEMICAL-KINETICS OF CHLORINE IN ELECTRON-CYCLOTRON-RESONANCE PLASMA-ETCHING OF SI, JPN J A P 1, 33(7B), 1994, pp. 4424-4432
Authors:
TUDA M
ONO K
YUUKI A
Citation: M. Tuda et al., TRANSPORT AND DEPOSITION PROCESSES OF SPUTTERED PARTICLES IN RF-MICROWAVE HYBRID SPUTTERING DISCHARGES, JPN J A P 1, 33(7B), 1994, pp. 4473-4477
Authors:
TUDA M
ONO K
TAKI M
NAMBA K
Citation: M. Tuda et al., MULTICUSP ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE WORKING WITH MICROWAVES RADIALLY INJECTED THROUGH AN ANNULAR SLIT, JPN J A P 1, 33(3A), 1994, pp. 1530-1537
Authors:
WAKATA H
TASEV E
TUDA M
ONO K
HARUTA K
UEDA Y
Citation: H. Wakata et al., INVESTIGATION OF THE BEHAVIOR OF PARTICLES GENERATED FROM A LASER-ABLATED SILICON TARGET USING TIME-OF-FLIGHT MEASUREMENTS, Applied surface science, 80, 1994, pp. 152-157
Authors:
TONEJC AM
BAGOVIC D
TUDA M
Citation: Am. Tonejc et al., TRANSMISSION ELECTRON-MICROSCOPY STUDY OF BALL-MILLED GA-SB POWDER MIXTURE, Materials letters, 20(1-2), 1994, pp. 51-61
Authors:
ONO K
TUDA M
OOTERA H
OOMORI T
Citation: K. Ono et al., ELECTRON-CYCLOTRON-RESONANCE PLASMA-ETCHING OF SI WITH CL2 - PLASMA CHEMISTRY AND MECHANISMS, Pure and applied chemistry, 66(6), 1994, pp. 1327-1334
Authors:
TUDA M
SHIMADA M
Citation: M. Tuda et M. Shimada, POPULATION-LEVEL ANALYSIS ON REDUCTION IN EQUILIBRIUM POPULATION-SIZEOF THE AZUKI-BEAN BEETLE, Researches on population ecology, 35(2), 1993, pp. 231-239
Authors:
TUDA M
Citation: M. Tuda, DENSITY-DEPENDENCE DEPENDS ON SCALE - AT LARVAL RESOURCE PATCH AND ATWHOLE POPULATION, Researches on population ecology, 35(2), 1993, pp. 261-271
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