Authors:
TURTSEVICH AS
KRASNITSKY VY
EMELYANOV VA
NALIVAIKO OY
KRAVTSOV SV
Citation: As. Turtsevich et al., THE EFFECT OF PRODUCTION CONDITIONS FOR IN-SITU PHOSPHORUS-DOPED LPCVD POLYSILICON IN MONOSILANE PHOSPHINE SYSTEM ON THE DEPOSITION PROCESSKINETICS, Thin solid films, 248(1), 1994, pp. 28-31
Authors:
LESNIKOVA VP
TURTSEVICH AS
KRASNITSKY VY
EMELYANOV VA
NALIVAIKO OY
KRAVTSOV SV
MAKAREVICH TV
Citation: Vp. Lesnikova et al., THE STRUCTURE, MORPHOLOGY AND RESISTIVITY OF IN-SITU PHOSPHORUS-DOPEDPOLYSILICON FILMS, Thin solid films, 247(2), 1994, pp. 156-161