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Results:
1-7
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Results: 7
Authors:
Hu, YZ
Tay, SP
Citation: Yz. Hu et Sp. Tay, Characterization of high-K dielectric ZrO2 films annealed by rapid thermalprocessing, J VAC SCI B, 19(5), 2001, pp. 1706-1714
Authors:
Tinani, M
Mueller, A
Gao, Y
Irene, EA
Hu, YZ
Tay, SP
Citation: M. Tinani et al., In situ real-time studies of nickel silicide phase formation, J VAC SCI B, 19(2), 2001, pp. 376-383
Authors:
Hu, YZ
Sharangpani, R
Tay, SP
Citation: Yz. Hu et al., In situ rapid thermal oxidation and reduction of copper thin films and their applications in ultralarge scale integration, J ELCHEM SO, 148(12), 2001, pp. G669-G675
Authors:
Sharangpani, R
Tay, SP
Citation: R. Sharangpani et Sp. Tay, Growth and characterization of rapid thermal chlorinated oxides grown using in situ generated HCl, J ELCHEM SO, 148(1), 2001, pp. F5-F8
Authors:
Smith, PM
Bailey, G
Hu, YZ
Tay, SP
Citation: Pm. Smith et al., Effect of ramp rate on the C49 to C54 titanium disilicide phase transformation from Ti and Ti(Ta), J VAC SCI B, 18(4), 2000, pp. 1949-1952
Authors:
Hu, YZ
Sharangpani, R
Tay, SP
Citation: Yz. Hu et al., Kinetic investigation of copper film oxidation by spectroscopic ellipsometry and reflectometry, J VAC SCI A, 18(5), 2000, pp. 2527-2532
Authors:
Hu, YZ
Tay, SP
Citation: Yz. Hu et Sp. Tay, Spectroscopic ellipsometry investigation of silicide formation by rapid thermal process, J VAC SCI B, 17(5), 1999, pp. 2284-2289
Risultati:
1-7
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