Authors: Tellier, CR Leblois, TG

Citation: Cr. Tellier et Tg. Leblois, Micromachining of quartz plates: Determination of a database by combined stereographic analysis and 3-D simulation of etching shapes, IEEE ULTRAS, 47(5), 2000, pp. 1204-1216

Authors: Leblois, TG Tellier, CR

Citation: Tg. Leblois et Cr. Tellier, Micromachined resonant temperature sensors: Theoretical and experimental results, IEEE ULTRAS, 47(2), 2000, pp. 333-340

Authors: Charbonnieras, AR Tellier, CR

Citation: Ar. Charbonnieras et Cr. Tellier, A kinetic formulation of piezoresistance in N-type silicon: Application tonon-linear effects, EPJ-APPL PH, 7(1), 1999, pp. 1-11

Authors: Schropfer, G de Labachelerie, M Tellier, CR

Citation: G. Schropfer et al., Applications and simulation of unconventional bulk-micromachining using underetching of {100} silicon planes, MICROSYST T, 5(4), 1999, pp. 194-199

Authors: Charbonnieras, AR Tellier, CR

Citation: Ar. Charbonnieras et Cr. Tellier, Characterization of the anisotropic chemical attack of {hk0} silicon plates in a TMAH solution - Determination of a database, SENS ACTU-A, 77(2), 1999, pp. 81-97