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Results:
1-15
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Results: 15
Authors:
Rousset, B
Furgal, L
Fadel, P
Fulop, A
Pujos, D
Temple-Boyer, P
Citation: B. Rousset et al., Development of SiNx LPCVD processes for microtechnological applications, J PHYS IV, 11(PR3), 2001, pp. 937-944
Authors:
Temple-Boyer, P
Launay, J
Hajji, B
Sarrabayrouse, G
Martinez, A
Citation: P. Temple-boyer et al., Study of capacitive structures for amplifying the sensitivity of FET-basedchemical sensors, SENS ACTU-B, 78(1-3), 2001, pp. 285-290
Authors:
Mailly, F
Giani, A
Bonnot, R
Temple-Boyer, P
Pascal-Delannoy, F
Foucaran, A
Boyer, A
Citation: F. Mailly et al., Anemometer with hot platinum thin film, SENS ACTU-A, 94(1-2), 2001, pp. 32-38
Authors:
Jalabert, L
Temple-Boyer, P
Sarrabayrouse, G
Cristiano, F
Colombeau, B
Voillot, F
Armand, C
Citation: L. Jalabert et al., Reduction of boron penetration through thin silicon oxide with a nitrogen doped silicon layer, MICROEL REL, 41(7), 2001, pp. 981-985
Authors:
Gall-Borrut, P
Belier, B
Falgayrettes, P
Castagne, M
Bergaud, C
Temple-Boyer, P
Citation: P. Gall-borrut et al., Silicon technology-based micro-systems for atomic force microscopy/photon scanning tunnelling microscopy, J MICROSC O, 202, 2001, pp. 34-38
Authors:
Temple-Boyer, P
Jalabert, L
Masarotto, L
Alay, JL
Morante, JR
Citation: P. Temple-boyer et al., Properties of nitrogen doped silicon films deposited by low-pressure chemical vapor deposition from silane and ammonia, J VAC SCI A, 18(5), 2000, pp. 2389-2393
Authors:
Jalabert, L
Temple-Boyer, P
Olivie, F
Sarrabayrouse, G
Cristiano, F
Colombeau, B
Citation: L. Jalabert et al., Relation between residual stress and electrical properties of polysilicon/oxide/silicon structures, MICROEL REL, 40(4-5), 2000, pp. 597-600
Authors:
Hajji, B
Temple-Boyer, P
Launay, J
do Conto, T
Martinez, A
Citation: B. Hajji et al., pH, pK and pNa detection properties of SiO2/Si3N4 ISFET chemical sensors, MICROEL REL, 40(4-5), 2000, pp. 783-786
Authors:
Belier, B
Santoso, A
Bonnafe, J
Nicu, L
Temple-Boyer, P
Bergaud, C
Citation: B. Belier et al., Micro-optomechanical sensor for optical connection in the near field, APPL PHYS L, 77(12), 2000, pp. 1768-1770
Authors:
Temple-Boyer, P
de Mauduit, B
Caussat, B
Couderc, JP
Citation: P. Temple-boyer et al., Correlations between stress and microstructure into LPCVD silicon films, J PHYS IV, 9(P8), 1999, pp. 1107-1114
Authors:
Nicu, L
Temple-Boyer, P
Bergaud, C
Scheid, E
Martinez, A
Citation: L. Nicu et al., Energy study of buckled micromachined beams for thin-film stress measurements applied to SiO2, J MICROM M, 9(4), 1999, pp. 414-421
Authors:
Temple-Boyer, P
Hajji, B
Alay, JL
Morante, JR
Martinez, A
Citation: P. Temple-boyer et al., Properties of SiOxNy films deposited by LPCVD from SiH4/N2O/NH3 gaseous mixture, SENS ACTU-A, 74(1-3), 1999, pp. 52-55
Authors:
Hajji, B
Temple-Boyer, P
Olivie, F
Martinez, A
Citation: B. Hajji et al., Electrical characterisation of thin silicon oxynitride films deposited by low pressure chemical vapour deposition, THIN SOL FI, 354(1-2), 1999, pp. 9-12
Authors:
Paillard, V
Puech, P
Temple-Boyer, P
Caussat, B
Scheid, E
Couderc, JP
de Mauduit, B
Citation: V. Paillard et al., Improved characterization of polycrystalline silicon film, by resonant Raman scattering, THIN SOL FI, 337(1-2), 1999, pp. 93-97
Authors:
Temple-Boyer, P
Olivie, F
Scheid, E
Sarrabayrouse, G
Alay, JL
Morante, JR
Citation: P. Temple-boyer et al., Breakdown properties of metal NIDOS SiO2/silicon structures, MICROEL REL, 39(2), 1999, pp. 187-190
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