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Results:
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Results: 2
A computationally efficient method for three-dimensional simulation of ionimplantation
Authors:
Burenkov, A Tietzel, K Hossinger, A Lorenz, J Ryssel, H Selberherr, S
Citation:
A. Burenkov et al., A computationally efficient method for three-dimensional simulation of ionimplantation, IEICE TR EL, E83C(8), 2000, pp. 1259-1266
Optimization of 0.18 mu m CMOS devices by coupled process and device simulation
Authors:
Burenkov, A Tietzel, K Lorenz, J
Citation:
A. Burenkov et al., Optimization of 0.18 mu m CMOS devices by coupled process and device simulation, SOL ST ELEC, 44(5), 2000, pp. 767-774
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