Authors: Burenkov, A Tietzel, K Hossinger, A Lorenz, J Ryssel, H Selberherr, S

Citation: A. Burenkov et al., A computationally efficient method for three-dimensional simulation of ionimplantation, IEICE TR EL, E83C(8), 2000, pp. 1259-1266

Authors: Burenkov, A Tietzel, K Lorenz, J

Citation: A. Burenkov et al., Optimization of 0.18 mu m CMOS devices by coupled process and device simulation, SOL ST ELEC, 44(5), 2000, pp. 767-774