Authors:
Suliman, SA
Gollagunta, N
Trabzon, L
Hao, J
Ridley, RS
Knoedler, CM
Dolny, GM
Awadelkarim, OO
Fonash, SJ
Citation: Sa. Suliman et al., The dependence of UMOSFET characteristics and reliability on geometry and processing, SEMIC SCI T, 16(6), 2001, pp. 447-454
Citation: L. Trabzon et Oo. Awadelkarim, Damage to sub-half-micron metal-oxide-silicon field-effect transistors from plasma processing of low-k polymer interlayer dielectrics, SEMIC SCI T, 15(4), 2000, pp. 309-314
Citation: L. Trabzon et al., Dependence of the performance and reliability of n-metal-oxide-silicon field effect transistors on interlayer dielectric processing, J VAC SCI B, 17(5), 1999, pp. 2216-2221