Authors:
Normand, P
Kapetanakis, E
Tsoukalas, D
Tserepi, A
Tsoi, E
Beltsios, K
Aidinis, K
Zhang, S
van den Berg, J
Citation: P. Normand et al., Silicon-nanocrystal-based multiple-tunnel junction devices obtained by a combination of V-groove and ion beam synthesis techniques, MICROEL ENG, 57-8, 2001, pp. 1003-1007
Authors:
Patsis, GP
Tserepi, A
Raptis, I
Glezos, N
Gogolides, E
Valamontes, ES
Citation: Gp. Patsis et al., Surface and line-edge roughness in solution and plasma developed negative tone resists: Experiment and simulation, J VAC SCI B, 18(6), 2000, pp. 3292-3296