Authors: ILG M KRAXENBERGER M URAM K SANDLER N PARKS C NGUYEN S

Citation: M. Ilg et al., MODULATION-DOPED SILICATE GLASS DEPOSITED BY LOW-PRESSURE CHEMICAL-VAPOR-DEPOSITION, Superlattices and microstructures, 24(5), 1998, pp. 385-388

Authors: WERNER C ILG M URAM K

Citation: C. Werner et al., 3-DIMENSIONAL EQUIPMENT MODELING FOR CHEMICAL-VAPOR-DEPOSITION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(3), 1996, pp. 1147-1151