Authors:
ILG M
KRAXENBERGER M
URAM K
SANDLER N
PARKS C
NGUYEN S
Citation: M. Ilg et al., MODULATION-DOPED SILICATE GLASS DEPOSITED BY LOW-PRESSURE CHEMICAL-VAPOR-DEPOSITION, Superlattices and microstructures, 24(5), 1998, pp. 385-388
Citation: C. Werner et al., 3-DIMENSIONAL EQUIPMENT MODELING FOR CHEMICAL-VAPOR-DEPOSITION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(3), 1996, pp. 1147-1151